Bio:

Philippe DE BETTIGNIES is the Advanced Technology Roadmap Manager at HORIBA France, in charge of establishing the directions for Innovation and R&D inside the company for the next 5-10 years to support its growth, and also listening to the progress in public research that would be of interest. He was previously the R&D manager of AFM and Raman microscopy in HORIBA during more than 10 years, and works now inside the Innovation team.

Abstract :

HORIBA France, pioneer in optical instrumentation and measurement systems, is a supplier of OEM solutions and benchtop instruments for both industrial and academic sectors. Targeting markets such as semiconductor metrology, environmental monitoring, and life sciences, HORIBA is developing a new range of optical sensors while scaling up current technologies (Raman, Photoluminescence, Ellipsometry) from laboratory settings to industrial environments.
In this presentation, we will present our roadmap for these advanced sensors, along with innovations in the needed sub-components to address the market challenges such as throughput enhancement, compact design, robustness, and seamless integration within fabrication facilities. We will illustrate the practical application of these developments with the Raman metrology inspection in semiconductor manufacturing.