Bio:

Marie Bousquet is a Research Engineer at CEA-LETI, Grenoble, France. She received M.S. and PhD degrees in materials science from the University of Limoges, France, in 2007 and 2010, respectively. After 6 years of academic and industrial experiences, she joined the CEA-LETI, Grenoble, France where her interest is on the integration of piezoelectric materials (LiNbO3 and LiTaO3) in RF acoustic devices (SAW, BAW, Lamb) and management of industrial and academic R&D projects. She has authored and co-authored more than 40 scientific journal and conference papers and contributed to 10 patents on RF acoustic devices.

Abstract:

The FR3 range, from 7.125 to 24.25 GHz, is expected to extend by exploiting an intermediate region between the sub-6 GHz and the millimetric range. Filtering solutions based on Bulk Acoustic Wave (BAW) filters have to adapted for this frequency range. In this talk, we will present the main challenges (design, co-integration, process control, wafer level packaging, and so on) related to the up-scaling of BAW technologies for this frequency range. This will be exemplified by preliminary results based on AlScN and LiNbO3 BAW devices for this frequency