Bio:

Tuomas Pensala received the M. Sc. degree in Engineering Physics from the Helsinki University of Technology in 2000 and the D. Sc. (Tech.) degree in Applied Physics from the Aalto University in 2011. He has worked for the VTT Technical Research Centre of Finland since 1998 where he presently holds a position of Research Team Leader of the RF microsystems team. His research interests include RF devices based on thin film technology such as GHz range BAW/FBAR resonators and filters and IPD. He has also worked on piezoelectric MEMS sensors and timing devices. He has authored and co-authored more than 50 scientific journal and conference papers on thin film, RF and MEMS devices and contributed to almost 30 patent families.

Abstract:

The FR3 range, from 7.125 ta 24.25 GHz, is expected ta extend by exploiting an intermediate region between the sub-6 GHz and the millimetric range. Filtering solutions based on Bulk Acoustic Wave (BAW) filters have to adapted for this frequency range. In this talk, we will present the main challenges (design, co-integration, process control, water level packaging, and so on) related to the up-scaling of BAW technologies for this frequency range. This will be exemplified by preliminary results based on AIScN and LiNbO3 BAW devices for this frequency.