Bio :

Jean-Marc Girard, Ph.D. is the CTO and Sr. VP of Manufacturing Technologies at Air Liquide Advanced Materials (ALAM), which is a leading supplier of dry deposition materials and low GWP etching gases. Jean-Marc leads ALAM’s R&D in the EU, US and Japan and oversees strategic partnerships with chip makers, equipment companies, and research institutes.
He graduated from Ecole Normale Superieure de Lyon in physical chemistry, and holds a Ph.D. (1994) from CEA - Université Paris-Sud in Plasma Physics. He joined Air Liquide in 1994 and held several positions of growing responsibilities in France and Japan, serving the semiconductor industry.

Abstract :

Fluorinated gases represent up to 80% of a fab's carbon footprint, and as such, harnessing their emission is key for our customers to meet their climate objectives. Among the other actions undertaken around abatement technologies, substitution -or anticipated substitution- of the highest impact gases is making rapid progresses at advanced nodes. However, installed capacity and legacy nodes manufacturing fabs are mildly receptive to process changes and new ways of collaboration must be developed to decrease the barrier to change.