Bio:

Isabelle SERVIN is a research scientist at CEA-Leti, Grenoble (France). Since 2022, she has joined the eco-innovation program, as sustainability advisor for Technological Silicon Platform. She evaluates the environnemental impacts of processes in clean room through The Life Cycle Assessment (LCA) methodology for IC industry. She has 20 years of experience in the development of lithography processes for microelectronics, both in industry and R&D. She received her PhD on polymer chemistry from University Pierre & Marie Curie (Paris, France) in 1998.

Abstract:

In semiconductor industry, energy efficiency and water management are crucial to reduce the environmental impacts of chips manufacturing.
CEA-Leti will propose ways to improvement energy efficiency both to infrastructure and production equipment.
Additionally, techniques such as water reuse and adoption of advanced technologies for water treatment and purification are currently implemented to reduce water usage in cleanrooms, contributing thus to sustainable management of resources.