Bio :

He is now the Leader and Professor of Integrated Green-niX+ Research Unit, Institute of Innovative Research, Tokyo Institute of Technology (Tokyo Tech). After NEC, MIT and Sony, he has joined Tokyo Tech since 2013, and had served as Director of Research Institute for the Earth Inclusive Sensing and the Member of the Education and Research Council. He also serves as the Research Supervisor of JST-PRESTO, the Deputy Leader of Device Tech. Div., Leading-edge Semiconductor Technology Center, Associate Member of Science Council of Japan, and the Chair of Conference on Ion-Implantation Tech. 2024. He had also engaged in the Directors of JSAP, JIEP, Japan MOT Society, Symp. on VLSI Tech., EDTM, IWJT and IEEE/EDS/VLSI Tech. & Circuits Committee.

Abstract :

2D transition-metal di-chalcogenide (TMDC) devices formed by physical-vapor deposition (PVD) method will be discussed for chiplet systems. Especially, MoS2, WS2 and ZrS2 FETs will be disclosed for future 3D-stacked FET and CFET. Furthremore, WS2 thermoelectric generators will be also shown for chiplet systems.